[Breaking Taps] has an investigation of a MEMS chip. MEMS is short for Micro Electromechanical Systems, which operate in a decidedly mechanical way. You can see the video, which has some gorgeous ...
And really, MEMS chips are using the same principle to detect motion, just on a much smaller scale. Want the MEMS basics? [Al] has you covered.
A sensor startup is revisiting MEMS manufacturing process with a new fabrication IP to make it more reliable and scalable.
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