Whereas the IC exploits the electrical properties of silicon, MEMS takes advantage of other material properties like optical, mechanical, thermal, magnetic, chemical, etc. Functionality of a MEMS ...
This effort has led to research in pursuit of ways to integrated post-CMOS technologies while maintaining the good MEMS materials properties required for applications such as accelerometers, other ...
Undergraduate and graduate students interested in the physics and design of microsensors, size scale in MEMS materials, micro and nanomanipulation, etc. should take this course. MEMS is an emerging ...
This effort has led to research in pursuit of ways to integrated post-CMOS technologies while maintaining the good MEMS materials properties required for applications such as accelerometers, other ...
Undergraduate and graduate students interested in the physics and design of microsensors, size scale in MEMS materials, micro and nanomanipulation, etc. should take this course. MEMS is an emerging ...
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